Contaminants

杂质

Specifications (ppmv)

规格

Ar

Argon 氩气

<0.05

Total Chlorosilane

Total Chlorosilane 总氯硅烷

<0.15

Disilane

Disilane 乙硅烷

<0.5

He

Helium 氦气

<1

O₂

Oxygen 氧气

<0.05

N₂

Nitrogen 氮气

<1

H₂

Hydrogen 氢气

<20

CO

Carbon Monoxide 一氧化碳

<0.05

CO₂

Carbon Dioxide 二氧化碳

<0.05

CH₄

Methane 甲烷

<0.05

Carbon

Carbon 碳

<0.2 ppma

Disiloxane

Disiloxane 二硅氧烷

<0.5

Methylsilane

Methylsilane 甲基硅烷

<0.5

Al

Aluminium 铝

<0.005 ppba

Sb

Antimony 锑

<0.005 ppba

As

Arsenic 砷

<0.005 ppba

B

Boron 硼

<0.02 ppba

Ca

Calcium 钙

<10 ppba

Ga

Gallium 鎵

<0.005 ppba

In

Indium 铟

<0.005 ppba

P

Phosphorus 磷

<0.02 ppba

K

Potassium 钾

<10 ppba

Na

Sodium 钠

<5 ppba

Cr+Cu+Fe+Ni+Zn

铬+铜+铁+镍+锌

<1 ppba

H₂O

Moisture 水

<0.5

Resistivity

Resistivity 电阻系数

>10000 ohm-cm

Cylinder Type气瓶规格

47ℓ,  Ton-cylinder,  20ft ISO-Container,  40ft ISO-Container

Fill Weight充装量 (kg)

10,    100 ,          2000 ,               4000

Valve Connection 阀门(CGA)

JIS 22L,  CGA 632,  CGA350